Semiconductor standard robot

The Transfer Robot applied in the wafer transfer and loading process of semiconductor manufacturing technology can achieve precise position control.
Outline drawing

Product parameters


Items WTR Standard Robot
Applicable Size 6" (150mm)~ 12" (300mm)
Applicable Grip System Vacuum / Edge Grip
The Number of Axis 4 Axis
Arm Type Link (Scara)
STROKE R-Axis mm 588
L-Axis mm 588
TH-Axis °(deg.) 330
Z-Axis mm 300~650
MAX. SPEED R-Axis mm/s 700
L-Axis °/sec 700
TH-Axis mm/s 250
Z-Axis mm/s 350
REPEATABILLTY mm 0.1(P-P)

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