EFEM (Equipment Front End Module) is the core component of semiconductor equipment front-end that performs Foup gate opening and closing operations, and performs wafer transfer and loading/unloading between Foup and equipment. As a semiconductor automation core equipment composed of multi joint robots, its function is to transport silicon wafers or photomask templates to process modules (front and back processes). EFEM consists of wafer transfer robots (ATM Robots), calibrators, fan filter units (FFUs), and loading ports, and can be customized and manufactured according to customer needs.